IBAD和磁控溅射对银膜性能的影响

Microstructure and properties of silver films obtained using ion beam composite deposition

本文主要研究用离子束辅助沉积(IBAD)和磁控溅射不同沉积技术在9Cr18钢材上沉积软金属银固体润滑膜。用百格刀划格法、SEM和MS-T3000多功能摩擦磨损仪等测试方法测试沉积银膜与基材间的结合力、银膜的显微结构和摩擦磨损性能等。结果表明,与磁控溅射沉积技术相比,IBAD技术制备的银膜形成一层化学冶金结合与机械啮合结合的过渡层,可提高膜层与基材的结合力,增加膜层的耐磨性。

Using ion beam composite deposition method Magnetron sputtering deposition, soft metal solid lubricant of Ag film was grown on 9Cr18 steel substrate. The microstructures and friction properties were measured by means of the hundred cell knife scratch method, MS-T3000 multi-meter friction and wear testing and scanning electron microscopy. The results showed that compared with the magnetron sputtering method, a transition layer bonded with chemical metallurgy and mechanical engagement is formed after ion beam composite deposition. The transition layer can be attributed to the strong adhesion between the film and the substrate.