WO_x薄膜结晶特性的HREM和STM研究

Study on the Crystalline Property of WOx Films with HREM and STM

对反应溅射沉积的ＷＯｘ薄膜在电致变色反应中结晶性能的变化进行了研究。结果表明：电致变色反应增加了薄膜的晶体特性，使着退色ＷＯｘ薄膜的选区电子衍射呈现明显的多晶环特性，而原始沉积态ＷＯｘ薄膜为非晶光晕衍射特性。ＳＴＭ分析得知，电致变色反应使薄膜的表面形貌也发生了剧烈的变化。

The crystalline property of reaction sputtering deposition WOx films,caused by electrochromic reaction,was studied with HREM and STM techniques.The HREM results show that electrochromic reaction increases the crystal property of the films,and SAD of WOx films in bleached and colored states is of crystalring,and in deposited state is of amorphoushalo.The STM results disclose that electrochromic reaction make a great change in the morphology of films.