摘要
设计了由压电陶瓷施压的柔性变焦镜的结构。根据弹性力学建立了相应的数学模型，采用有限元法计算了镜面受力的挠变形值。当柔性变焦镜最大挠度为９μｍ时，镜面的曲率半径从６１０ｍｍ变至５９０ｍｍ，此时采用环形筋条结构的反射镜镜面和理想球面的面形偏差ＰＶ值仅为１μｍ，面形相对偏差为０．３％。
A new style of flexible focus variable mirror which is forced by piezoelectric ceramic is designed in this paper. Finite elements method is used to calculate the mirrors deflection and the deviation of surface shape is quoted to evaluate the mirrors imaging quality. When the maximum deflection is 9μm, the radius of mirrors curvature is varying from 610mm to 590mm and the PV value of deviation is 1μm, the relative deviation of surface shape is 0.3%.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
1999年第2期189-194,共6页
High Power Laser and Particle Beams
基金
国家863激光技术青年基金
关键词
柔性变焦镜
压电陶瓷
激光传输
聚焦系统
focus variable mirror
piezoelectric ceramic
finite element method
deviation of surface shape
