摘要
利用ｐ偏振光在镀膜平板玻璃前后表面反射光强比γ与膜层光学参数之间的密切关系，给出了玻璃表面层的光学参数分布．对典型的薄膜系统—单面镀膜与双面镀膜两种情况，理论分析了玻璃表面层对薄膜光学参数测量的影响．实验上对ＰＭＴＥＳ和ＳｎＯ２薄膜参数进行了测量，仅当计及玻璃表面层作用时。
Based on the characteristic of the angular modulation curves of the reflectance ratio
γ of p polarized beam closely related to the films optical parameters,the optical profile of
surface layers on K9 glass in investigated.For two typical film systems,in which the film coated
on one side or both sides of the glass,it is analyzed the influence of glass layers on the
measurement of the optical parameters of the films.Experimentally it is measured the optical
parameters of PMTES and SnO 2 films.The results indicate that the experimental results
coincide well with the theoretical simulation only if the glass surface layers are considered.
出处
《光子学报》
EI
CAS
CSCD
1999年第5期467-472,共6页
Acta Photonica Sinica
关键词
表面层
p偏振光
光学参数
薄膜光学
玻璃
Surface layer
P polarized light
Reflectance ratio
Optical parameter
