利用激光刻蚀技术提高Ba0.5Sr0.5Co0.8Fe0.2O3-δ膜的透氧能力(英文)

Improving the Oxygen Permeability of Ba_(0.5)Sr_(0.5)Co_(0.8)Fe_(0.2)O_(3-δ) Membranes by Laser Ablation

利用激光刻图机对Ba0.5Sr0.5Co0.8Fe0.2O3-δ(BSCFO)透氧膜表面进行刻蚀,以提高膜表面的比表面积,改善膜的氧表面交换能力,从而达到提高透氧量的目的.研究结果表明,激光刻蚀在膜表面形成宽150μm,深25μm的条纹,可以显著提高膜表面的比表面积.XRD图谱显示,激光刻蚀不会引起BSCFO相结构的变化.透氧量测试表明,激光刻蚀可以增大透氧量,十字交叉双面刻蚀效果更加显著.十字交叉双面刻蚀后,其透氧量比未用激光处理的样品提高了大约34%.

The surfaces of Ba0.5Sr0.5Co0.8Fe0.2O3-δ（BSCFO） membranes were decorated by laser ablation treatment in order to increase the specific surface of the membrane surface,and laser ablation treatment could improve the ability of oxygen surface exchange and enhance the oxygen permeation flux of the membranes.The arc shape stripes with width about 150μm and depth about 25μm increase the specific surface of the membrane surface significantly,which were made by laser ablation treatment.XRD patterns showed that the BSCFO phase structure was kept after laser ablation treatment.The oxygen permeation fluxes through the membranes after laser ablation treatment were enhanced,and laser ablation treatment with cross stripes pattern on both sides of the membranes had a signification impact on the oxygen permeation flux.The oxygen permeation flux through the membrane with cross stripes pattern on both sides was 34% higher than that through membranes without laser ablation treatment.