摘要
采用钛酸锶钡(BST)薄膜变容管作为可调电容元件,在LaAlO3基片上采用微细加工技术制备了共面波导结构的C-L-Cπ型可调匹配网络。仿真及测试结果表明,通过在BST薄膜变容管上施加直流偏置电压对BST变容管的电容进行调节,可以在740～770 MHz频率范围内,实现该匹配网络与终端负载之间良好的阻抗匹配。其中,在760 MHz时测得的匹配网络的反射系数S11达到–45.8 dB。
A tunable matching network with coplanar waveguide（CPW） structure was fabricated on LaAlO3 substrate by using the micro-fabrication technique.The fabricated network was a π-type network with a capacitor-inductor-capacitor（C-L-C） configuration,and the tunable capacitor components used in this network are the barium strontium titanate（BST） thin film varactors.The simulation and measurement results show that,by tuning the capacitance of BST varactors by applying DC bias voltage to the varactors,good impedance matching between the network and the source can be achieved in the range of 740 MHz^770 MHz.The reflection coefficient S11 of the network measured at 760 MHz reaches –45.8 dB.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2010年第12期34-36,共3页
Electronic Components And Materials
基金
国家自然科学基金资助项目(No.60871049)
