五自由度宏/微双重驱动并联机构及其运动学分析

5-DOF dual-drive parallel mechanism and its kinematics

提出了一种扫描电子显微镜用4-PSPS/PRPUR五自由度宏/微双重驱动并联机构,该机构可以实现三维移动和两维转动。采用螺旋理论分析了该机构的自由度,采用基于螺旋系线性相关性的并联机构输入选取判别方法,选取了驱动副并进行了合理性判别。在此基础上对该双重驱动并联机构进行了位置反解分析,结合其应用给出了数值算例,并进一步对该机构进行了速度、加速度分析,且给出了速度、加速度的数值算例。

A novel 4-PSPS/PRPUR dual-drive parallel mechanism for scanning electronics microscopes,which can perform threedimensional transfers and two-dimensional rotations is proposed.The degree of freedom is analyzed based on the screw theory.Based on the concepts of reciprocal screws and their linear correlativity,the rationality of chosen input joints is discussed.The inverse position kinematics solution of the mechanism and corresponding numerical examples are presented.Furthermore,the velocity and acceleration analysis of the mechanism are given and corresponding numerical examples are presented.