基于微光机电系统的微感知技术

The Micro Perception Technology Based on Micro-Opto-Electro-Mechanical Systems

微光机电系统技术是在微机电系统技术基础之上发展起来的具有多种学科交叉融合特征的前沿高新技术,在该技术上建立的微感知技术是未来微系统技术的核心技术之一。由于微感知技术具有微型化、集成化和智能化的特点,未来在国防军工、精密仪器、特殊工业,以及环境检测等领域将有广泛的应用前景。首先描述了微感知技术的技术特征,同时对当前国内外的微感知技术研究情况进行了介绍,总结了微光机电系统的几个亟待突破的技术问题,并指出了微感知技术面临的挑战。通过对发展微感知技术需要关注问题的思考,对我国微感知技术的发展提出了建议。

The technology of Micro-Opto-Electro-Mechanical Systems（MOEMS） is the foreland rising technology of multi subjects amalgamating,and the micro perception technology which is based on MOEMS is one of the future micro system kernel technologies.Because of the tiny,compositive and intelligent characteristics,the micro perception technology has broad application prospects in the fields of national defence,precise apparatus,special industry and environment detection.The characters of the micro perception technology have been described.At the same time,the overseas and internal research instance about the micro perception technology is introduced.Several problems about MOEMS which are anxious to be solved are summarized,and the challenges that the technology will be in face of are pointed.By considering the problems that developing the technology needs to be noticed to,the suggestion that how to develop the technology has been given.