摘要
研究了多孔氧化铝薄膜的制备工艺以及影响其成孔效果的主要因素。采用分步阳极氧化的方法和适当的工艺步骤获得了孔洞分布均匀、孔径一致且耐水合的多孔氧化膜,此类氧化薄膜在经过后续的特殊处理后可以用于制备湿度传感器和AAO薄膜。
The fabrication process of porous alumina film and influence factors of hole created by anodic oxida tion are studied. The porous oxide film of good void distribution, aperture size consistency and water resistance is ob tained by oxidation by-step methods and the suitable process parameters. After a follow-up special treatment, the oxi de films can be used to prepare humidity sensor and AAO film.
