固贴式薄膜体声波谐振器用材料体系研究进展

Progress in Materials Used for Solidly Mounted Film Bulk Acoustic Resonators

固贴式薄膜体声波谐振器(SMR-FBAR)技术是近年来电子工业领域里的突破性技术,具有2GHz以上的工作频率、极高的的品质因子及良好的机械稳定性等众多的优异特性.基于其独特的优越性,固贴式薄膜体声波谐振器成为了科研工作者们关心的热点,并在第三代无线通信系统中已得到广泛应用,例如作为基本单元用来制作滤波器、双工器和振荡器等第三代无线通信系统中的频率选择器件.器件选用的材料体系是决定器件性能的关键因素.本文以器件结构为线索,综述了固贴式薄膜体声波谐振器用材料体系的研究进展,包括压电薄膜(氮化铝、氧化锌等)、高/低声阻抗材料以及电极薄膜,讨论了材料性能和器件性能的关系,并对材料体系下一步的研究方向进行了展望。

Solidly mounted film bulk acoustic resonator （SMR-FBAR） is a breakthrough technology being developed recently in the field of electronics industry and has many excellent features, such as operation frequency of above 2 GHz, ultra-high Q factor and durable mechanical property, etc. The unique features of the SMR-FBAR make it not only be a hot spot in labs, but also attractive in particular applications. For instance, SMR-FBAR can be used to create the essential frequency shaping elements found in the third generation of wireless communication systems, including filters, duplexers, and oscillators. Materials are the key element in devices and their quality plays a critical role in determining the resonance characteristics of these acoustic resonators. In this paper, with the clue of the structure of device, the recent developments of materials used for solidly mounted film bulk acoustic resonators are reviewed, including piezoelectric films （AIN, ZnO, etc）, high/low acoustic impedance materials and electrode films. The relationship between material properties and device performance is also discussed. Finally, the potential development direction on the investigation of materials used for solidly mounted film bulk acoustic resonators is prospected.