小直径金属基球头金刚石砂轮电火花修整技术

Electrical Discharge Dressing Technique of Metal-bonded Ball-headed Diamond Wheel

针对深凹非球曲面器件及半球谐振子超精密磨削中使用的小直径金属基球头金刚石砂轮,提出一种基于电火花修整原理的精密修整方法。从理论上分析机械误差及修整参数对砂轮修整后面形精度的影响,基于理论分析结果研制金刚石球头砂轮电火花修整装置。通过正交试验研究修整参数对砂轮面形精度的影响规律,得到最优电火花修整参数。试验结果表明,修整后的砂轮面形精度优于0.8μm,磨粒突出效果良好,可以满足半球谐振子及其他光学零件超精密磨削中砂轮修整需要。

In respect to metal-bonded ball-headed diamond wheel with small diameter used in ultra-precision grinding for deep concave non-spherical curved surface part and hemispherical resonator,a precision dressing method based on electrical discharge machining principle is put forward.The effects of mechanical errors and dressing parameters on the profile accuracy of dressed wheel are theoretically analyzed.A ball-headed diamond wheel dressing device is designed and built on the basis of the analysis results.The influence of dressing parameters on the profile accuracy of dressed wheel is investigated by orthogonal experiments,then the optimal electrical discharge parameter is obtained.The experimental results show that the dressed wheel’s profile accuracy is superior to 0.8 μm with good effect of abrasive protrusion,thus meeting the requirement of wheel dressing in ultra-precision grinding of hemispherical resonator and other optical parts.