基于多学科优化的大口径光学元件表面洁净度检测系统

Large-caliber Optical Surface Cleanliness Testing System Based on Multi-disciplinary Optimization

基于机器视觉的图像处理方法突破了检测区域的尺寸限制,能满足大口径光学元件表面洁净度检测的需要,但存在光、机、电耦合问题。采用多学科设计优化方法处理学科间的耦合关系,建立了学科间耦合关系和学科耦合分析模型,实现了学科协调;分析了光学系统设计、运动系统设计、结构设计、图像拼接、图像处理和洁净度计算等多学科子系统实现的关键点,建立了满足检测要求的检测系统。

Image processing methods based on machine vision meet the needs of large-caliber optical surface by breaking the detection of regional size limits,but with coupling of light,mechanical and electrical elements.The coupling relations of different subsystems were treated with multi-disciplinary design optimization approach,by establishing the coupling relation of disciplinary,the coupling analysis model,to achieve subject co-ordination.The key points of optical subsystem design,movement subsystem and structural design,image mosaic,image processing and cleanliness calculated were systematically represented.The testing system was built to meet the testing requirements.