磁控溅射铝镀层组织对316L不锈钢阳极氧化微孔形成的影响

Effect of structure of aluminum film by magnetron sputtering on micro-pores formed on 316L stainless steel by anodizing

采用非平衡磁控溅射方法在316L不锈钢表面制备了不同形态与组织结构的铝膜,以该铝膜为模板,通过阳极氧化的方法,在316L不锈钢基体上制备了微孔。研究了铝膜的组织结构对不锈钢表面微孔形成的影响,并分析了基体上微孔的形成机制。结果表明,铝膜结构对微孔制备存在显著影响。当镀铝层晶粒细小、结构致密时,经过阳极氧化后,基体表面上能形成适于承载缓释药物的密度大、孔径小、形状规则的微孔;当镀铝层组织疏松多孔时,在基体表面生成的孔形状不规则,孔径大、密度小。

Aluminum films with different morphology and structure were deposited on 316L stainless steel by unbalanced DC magnetron sputtering at various substrate biases.Micro-pores were fabricated on the surface of 316L stainless steel substrate by anodizing.The morphology and structure of Al films were investigated,and its effect on the micro-pores forming was studied.The formation mechanism of micro-pores was analyzed by anodic polariztion process.It is indicated that when the Al films deposited on the surface of 316L stainless steel substrate are compact with fine grains,the micro-pores formed on the substrate display regular shape with small aperture and dense distribution,which are more applicable for biomedical materials.And Al films with considerable cavity result in large irregular pores with a sparse distribution.