腔镜加工误差和失调对光束质量的影响

Effects of process error and misalignment of resonant mirrorson output beam quality

首先分析了腔镜加工误差对输出耦合率及光束的影响;其次用几何光学方法分析了主、次腔镜失调灵敏度,并利用光学仿真软件GLAD模拟了腔镜失调对光束近场、远场及桶中功率(PIB)的影响。结果表明,腔镜曲率半径加工误差在±1%左右对光束质量有少许影响,可在后续光路中对其进行校正。腔镜失调可使光束近场分布不均匀,远场发生畸变,且腔镜失调同样的角度时,次镜对光束质量的影响要大于主镜。

Firstly,effects of process error about ±1% on output coupling efficiency and beam quality are analyzed.Secondly,misalignment sensitivity of primary mirror and secondary mirror are analyzed by geometric method,and effects of misalignment of resonant mirrors on beam near-field distribution,far-field distribution and power in the bucket（PIB）are simulated by GLAD.The results show that effects of process error on output beam quality can be neglected.Misalignment of resonant mirrors can make the near-field distribution uneven and far-field distortion.When resonant mirrors misalign the same angle,secondary mirror has more effect than primary on output beam quality.