二维光学自准直微角度传感器

2D micro-angle sensor based on laser autocollimation

为实现表面微形貌测量以及精密平台的定位测量,设计了一种结构简单的小体积二维微角度传感器。该微角度传感器基于激光自准直原理,主要由作为光源的激光二极管、自准直光路和作为位置探测器的四象限光电二极管组成。分析计算发现,角度传感器的灵敏度与光路中物镜的焦距无关,因此选用了焦距较短的物镜,以实现小体积、高灵敏度的目的。四象限光电二极管具有二维位置探测能力,利用其作为光电转换装置,微角度传感器可以同时探测两轴角度变化值。实验结果表明,微角度传感器的体积可达到25×20×13 mm3,角度测量范围±1 200 arcsec,分辨率为0.1 arcsec。实验中利用激光自准直仪进行对照,有效验证了这种新型二维光学自准直微角度传感器的可行性。

In order to solve the problems of measuring surface micro-profile and online measurement of precision platform,a compact two-dimensional micro-angle sensor was designed.The sensor based on the principle of laser autocollimation,was consisted of a laser diode as a light source and a quadrant photodiode as a position-sensing device.The sensitivity of the angle sensor does not rely on the focal length of the objective lens,which makes it probable to realize the compact volume.The quadrant photodiode has two-dimensional position-detecting capability,therefore,the angle sensor can detect two-axis tilt simultaneously.The micro-angle sensor has a dimension of 25×20×13 mm3.The detection range is ±1 200 arcsec and the resolution is 0.1 arcsec.Comparison experiments with an autocollimator were carried out,which testified the validity of the new compact 2D micro-angle sensor.