摘要
基于MEMS的非制冷红外探测器广泛用于军用和民用领域,其中作为探测器核心部件的焦平面探测阵列的读出电路等关键技术的研究至为重要。设计了一块240×320的焦平面探测阵列的读出电路,此电路能够抑制MEMS工艺的波动,减小探测器环境温度的影响。采用HHNEC 0.5μm工艺对此设计流片,其测试结果达到预期目标。芯片输出电压为1.5～3.5V,每帧图像输出时间为16.32ms,可以保证每秒61帧图像输出。
An uncooled infrared detector based on MEMS is widely used in military and civil field.Therefore,the critical technology of core component of the detector,i.e.ROIC（read out integrated circuit） of the focal plane array（FPA）,is of most importance.This work designed a ROIC of a 240×320 FPA.The circuit could suppress fluctuations of MEMS process as well as the environmental temperature of the detector.The design was fabricated in HHNEC 0.5 μm process.The test result is consistent with the expectations well.The output voltage of the chip is 1.5~3.5 V.And the image output time is 16.32 ms/frame,i.e.,the output speed of 61 frame/s is achieved.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2010年第4期580-584,共5页
Research & Progress of SSE
基金
国家自然科学基金资助项目（60906012）
