镀膜工艺对溶胶-凝胶法制备钛酸铝薄膜的影响

THE EFFECT OF COATING PROCESS ON THE PREPARATION OF ALUMINUM TITANATE FILM VIA SOL-GEL METHOD

采用溶胶-凝胶法,以钛酸四丁酯(Ti(OC4H9)4)和硝酸铝(Al(NO3)3.9H2O)为前驱体,乙醇为溶剂,利用硝酸铝中所含的结晶水代替水解反应所需的外加水,在莫来石基片上制备钛酸铝薄膜。借助偏光显微镜、SEM和XRD研究了提拉速度、浸渍时间和镀膜次数等镀膜工艺参数对镀膜效果的影响。研究结果表明:采用浸渍-提拉法,浸渍提拉速度为1mm/s、每次浸渍时间为30s,经过3次镀膜可以在莫来石基片上制备出均匀、致密、高质量的钛酸铝薄膜。

Aluminum titanate films coated on mullite substrates were prepared via sol-gel method, using tetrabutyl titanate （Ti （OC4H9）4） and aluminum nitrate （Al（NO3）3.9H2O） as precursors, ethanol as solvent and crystallization water in aluminum nitrate instead of additional water required for hydrolysis reaction. The effects of pulling speed, dipping time, coating times on the quality of aluminum titanate films coated on mullite substrates were studied by means of polarizing microscope, SEM and XRD. The results show that when pulling speed is 1mm/s, the dipping time is 30s, uniform, compact aluminum titanate films with high quality can be prepared on the surface of mullite substrates by coating for three times via dip-coating method.