用于光互连的聚硅氧烷脊型光波导研究

Study on polysiloxane ridge multimode optical waveguides for optical interconnection

采用软成型和图案转移技术,制备了可用于高速芯片间光互连的大尺寸聚硅氧烷脊型光波导,光波导长度达23 cm。利用有效折射率法,对芯层残留层和传输模场的关系进行了分析。采用截断和数字化散射两种方法,测得输入光波长为633 nm时的平均传输损耗小于0.14 dB/cm。研究结果表明,波导的长度和损耗指标满足高速芯片间光互连的要求。

Large-scale polysiloxane ridge multimode optical waveguides applied for inter-chip optical interconnection were designed and fabricated by the soft molding and pattern transferring.Length of the fabricated waveguides was more than 23 cm.The relationship between core residual layer and propagation mode was analyzed by the effective refractive index method.The optical propagation loss of waveguides was 0.14 dB/cm measured by the cutback method and 0.13 dB/cm measured by CCD camera photographing method at 633 nm.It can fulfill the demand of optical interconnection.