微机械谐振传感器的闭环恒幅驱动电路研究

Study on Closed-loop Driving Circuits of Micromechanical Resonator with Constant Vibrating Amplitude

本文分析了微机械谐振传感器的闭环工作特性，在此基础上研究了微机械谐振传感器的闭环恒幅驱动电路的设计原则，研制出闭环恒幅驱动电路，并在微谐振式真空传感器和双框架微谐振陀螺上得到应用。

In this paper, we analyze the characteristics of closed-loop micromechanical resonator. We research the design principles of the closed loop driving circuits of micromechanical resonator with constant vibrating am- plitude on the basis of analysis. Then, we develop the closed-loop driving circuits and apply the circuits to the micromechanical resonators.