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反馈补偿对高Q值加速度计动态性能的影响 被引量：3

Influence of Feedback Compensation on Dynamic Property for High-Q Capacitive Accelerometers
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摘要 高Q值MEMS电容式加速度计因具有很小的机械噪声,满足于高精度测量的需要,但欠阻尼的传感器系统动态性能较差,因此需要在闭环检测电路中通过补偿反馈模块施加电学阻尼,以降低系统Q值,改善系统的动态响应。首先通过MATLAB/SIMULINK仿真建立了带有延时的系统模型,进一步结合实际PCB板的测量,分析了不同反馈补偿参数下的阶跃响应和幅频响应曲线。实验结果表明,合适的反馈补偿参数能有效地降低系统Q值,改善动态响应。最后得出了该电容式加速度计在闭环系统下的较优比例微分参数的选择策略。 High-Q capacitive accelerometer has low mechanical noise, which meets high resolution application requirements. However, the system with an under-damping accelerometer results in bad dynamic response needs feedback compensation in a closed-loop circuit to increase electrical damping, reduce the Q factor and improve the dynamic response. Firstly, a simplified mathematical model with time delay was built based on the simulation of MATLAB/SIMULINK. Further, step responses and Q factors of the closed loop using different compensation parameters were discussed based on the simulation and PCB board level measurements. Results show that proper compensation parameters can effectively reduce the Q factor and improve the dynamic response of the closed-loop system. Finally, how to choose proper proportional- differential parameters in a closed loop for the capacitive accelerometer was obtained.
作者 戚玉婕 车录锋 孙腾 王跃林
机构地区 中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室 中国科学院研究生院
出处 《半导体技术》 CAS CSCD 北大核心 2011年第1期26-30,共5页 Semiconductor Technology
基金 国家高技术研究与发展计划(863计划)资助项目(2008AA042201)
关键词 电容式加速度计 反馈补偿参数 Q值 微机械系统 MATLAB capacitive accelerometer feedback compensation parameter Q factor micro- electro-mechanical system （MEMS） MATLAB
分类号 TH703 [机械工程—精密仪器及机械]
  • 相关文献

参考文献8

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共引文献5

同被引文献31

  • 1李锦明,张文栋,李林.电容式微机械陀螺品质因子测试方法研究[J].中北大学学报（自然科学版）,2006,27(4):357-360. 被引量：6
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引证文献3

二级引证文献5

半导体技术
2011年 第1期

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