空间域相位调制测长干涉仪的数据处理方法

DATA PROCESSING OF INTERFEROMETRY BASED ON SPATIAL PHASE MODULATION

本文采用最小二乘法对空间域相位调制形成的干涉场的采样数据进行处理，给出测量干涉场特征量（干涉场条纹宽度、初相位等）的数学处理方法，分析测量相位和位移的误差，指出激光束截面强度的非均匀性会给测量带来系统误差，最后提出一种以偶然误差替换这一系统误差的数学物理思想。

The least square method is used for processing of the sampled data of inerfering field based on spatial phase modul9ation in this paper .The treatment methods to solve characteristic parameters of light coherent field is given.With the analysis of the measuring errors,it is shown that the intensity nonuniformity on the cross section of laser beam may cause system error.At last,a way for reducing the system error is suggested.