双框架解耦微陀螺原理样机研制

Study on the prototype of dual frames decoupled micromechanical gyroscope

为了把驱动工作模态和检测工作模态有效隔离,以减小模态间的互相干扰,设计了一种双框架解耦微机械陀螺。通过采用可工程化的鲁棒优化结构设计和工艺补偿的制造工艺,实现了工艺误差范围内的稳健设计。这种内外框架结构的微陀螺设计,包括自激闭环驱动电路和开环检测电路,对微陀螺进行测试,得到微陀螺驱动模态品质因素>2000,检测模态品质因素>800,量程为2400°/s,线性度<0.3%,灵敏度为1°/s。

This paper presents a decoupled micromechanical gyroscope with dual frames.The robust structure considering fabrication errors is obtained by the use of optimal robustness of design and process compensation.Experimental results show that the quality factor of driving mode is more than 2 000,while the quality factor of sensing mode is more than 800;and the range is 2 400°/s,the sensitivity and linearity of the fabricated gyroscope are 1°/s and less than 0.3% respectively.