基于PSD的旋转机械振动传感器

Rotating Machinery Vibration Sensor Based on Position Sensitive Detector

研究了基于二维光位置敏感探测器(position sensitive detector,简称PSD)的激光振动传感器,重点介绍了PSD的结构、位置和振动检测原理,给出了位置坐标函数表达式和相应的输出信号检测电路框图,分析了影响该传感器检测精度的因素,提出了相应的解决办法,提供了传感器检定数据和实测振动波形。试验结果表明,该传感器各项性能指标完全满足旋转机械轴振测量要求,为旋转机械振动提供了一种新的可靠测量方法。

The vibration sensor based on laser and position sensitive detector（PSD）was researched.The PSD structure,measuring principle of position and vibration were introduced.The current function expression of position coordinate and the corresponding detecting circuit drawings were presented.The factors related to measurement accuracy of the sensor were analyzed and the solution was proposed.The verification data and vibration waveform were provided.The test results show that all performance indexes of the sensor can meet demands of rotor vibration measurement of rotating machinery.