45°倾斜镜多自由度精调结构设计研究

Design of Multiple DOF Fine Tuning Mechanism for 45° Tilting Mirror

对于高准确度光学系统,光学元件及其支撑机构之间的简单连接很难使光路对准并满足公差要求,本文介绍了一种在光学系统中能够对光路进行折转或分束的45°倾斜镜的精调支撑机构.该倾斜镜支撑结构采用了多自由度精调方式,能够在实现两维倾斜调整的同时,实现相互垂直光路的方向平移.设计中使用的柔性元件使结构的倾斜调整准确度达到角秒级,实现0-10 mm的位移,同时借鉴现有的燕尾槽导轨平移技术节省加工成本和减小周期,并且借助有限元分析软件,对机构中的关键部分进行了详尽的分析和论证.整个研究方法可作为同类光机系统设计时的参考,在光学系统的光路调整中有较大的应用价值.

Aiming at overcoming difficulties in requirements satisfaction of the tolerance by simple connecting the optical components with their mechanical supports in the acurate-fine optical system,which means it will cost extremely expectation to the accuracy of mechanical process and adjustments,a fine tuning supporting mechanism to the 45° tilting mirror which can split or deflect the beam in optical system is presented.By employing multiple DOF tuning mechanism,it can set the 2-D tilt and take displacements in the direction normal to beam path at the same time.Flexible element is designed to improve the adjusting accuracy to the magnitude of second.Dovetail groove rail displacement technique is considered to save the cost of fund and time in machining process,and its displacement rang is 0-10 mm.Detailed analysis and discussions are presented in the key part of the mechanism by finite element analysis software.The whole research technique can be a fine reference to the optic-mechanical system of the same kinds and has great application value in beam setting of optical system.