离轴非球面反射镜补偿检验的计算机辅助装调技术研究

Computer-aided Alignment of Off-axis Aspheric Mirrors in Null Testing

利用零补偿器实施离轴非球面元件面形的干涉检测中,为了实现反射镜的高准确度检测,对其干涉结果中的误差信息进行了分析.根据零补偿器的补偿原理,提出一种新的调整误差分离方法,建立了离轴非球面补偿检验的调整误差分离模型,并利用该模型对一块离轴非球面反射镜进行了仿真实验.调整前由调整误差引入的波像差为0.2332λRMS(λ=632.8nm),根据仿真结果调整后的波像差为0.0026λRMS,表明该方法具有较高的准确度,可有效提高检测效率.

Based on the principle of null lens,a new method of error-separation was proposed in null testing.A mathematic model was developed to separate misalignment-induced aberration from the test result.The method was used in the simulations of an off-axis aspheric mirror.The wavefront aberration induced by misalignment is 0.0026λRMS（λ=632.8 nm） after the alignment,compared with 0.2332λRMS before the alignment,which reflects that this method has high accuracy and can improve the efficiency of the null test.