几种任意步距步进相移算法的误差分析与对比

Analysis and comparison of errors in several phase stepping algorithm with an arbitrary step

介绍了到目前为止的几种任意步距步进相移算法，并针对相移干涉仪的两种主要误差———移相误差和探测器非线性误差进行了计算仿真，进而比较分析了它们对这这些误差的抑制能力，其结果可为实际应用合理地选择算法提供理论依据。

Several phase stepping algorithms with an arbitrary step at present are introduced, in which the analysis and comparison of error is also given. Phase shift miscalibration and detector nonlinearity are two main sources of error in phase shifting interferometry. Algorithms that calculate the phase of a measured wave front require a high degree of tolerance for these error sources. The paper provides the analysis of these errors resulting from different phase stepping algorithms with an arbitrary step by computer simulation and the result gives us a criteria of selection of them.