摘要
根据多年研制硅压阻传感器的经验，定性地归纳和探讨硅压阻传感器稳定性的主要影响因素，并提出相应的预防和解决措施。
It is qualitatively discussed and concluded in this paper some main factors to effect the stability of pieioresitive pressure sensons as well as given and the related precautions and measures to solve them according to the experinces accamulatd many years in the research and fabrication of the piezoresistive pressure sensor.
出处
《仪表技术与传感器》
CSCD
北大核心
1999年第8期1-2,29,共3页
Instrument Technique and Sensor
关键词
硅压阻传感器
稳定性
传感器
Diffased Si,Prezoresistive Sensor,Stability
