石英晶体谐振器预应力条件下的模态分析

Pre-stressed modal analysis on quartz crystal resonator

针对石英晶体谐振器在受到外力后其振动模态如何变化的问题,基于Mindlin的振动理论通过ANSYS有限元仿真得出横向力引起石英晶体谐振器的振动模态形状。结果表明:在外力的作用下石英晶体的振动位移大小和振动方向都发生了改变。该结果对于压力传感器和石英微天平的开发应用具有重要意义。

Aiming at the problem of the change vibration mode of the quartz crystal resonator under the influence of the external forces. A model of quartz crystal is constructed by finite element analysis code ANSYS. Based on Mindlin＇s vibration theory and the transverse force-induced mode shapes are derived. The results show that vibration displacement and vibration direction of quartz crystal are changed under the influence of external force. The research has important meaning in development and application of the pressure sensors and quartz crystal microbalanee.