干涉法表面形貌测量使用的扩展深度测量范围的方法

Method for Expanding the Depth Measuring Range in the Surface Topography Measurement by Interferometry

系统归纳了在干涉法表面形貌测量中使用的用来扩展深度测量范围的各种方法，分析了这些方法的原理、特性及性能指标，比较了这些方法的优越性。

The existing various methods used to expand the depth measuring range for measurement of the surface topography with interferometry were described, their principle and property were analyzed, and their superiority was compared.