摘要
建立了电容式微加速度计的结构模型,运用有限元分析方法对其进行模态分析,研究了微加速度计结构尺寸对谐振频率和模态振型的影响,得出了结构尺寸对这两者的影响规律,为此类加速度计的结构设计提供了依据。
A solid modeling of capacitive micro accelerometer structure is described. The mode analysis by means of the Finite Element Method is presented. The influence of accelerometer structural dimension on the resonance frequency and structural mode is investigated, which offers reliable basis for the structure design of micro accelerator.
出处
《光学精密工程》
EI
CAS
CSCD
1999年第4期59-64,共6页
Optics and Precision Engineering