摘要
目的研究氮化钛(TiN)镀膜对纯钛铸件表面硬度和耐磨性的影响。方法应用闭合场非平衡磁控溅射(CFUBMS)方法在纯钛铸件表面制备TiN薄膜,显微硬度仪测量纯钛铸件表面硬度,磨擦磨损试验评估其耐磨性。结果纯钛铸件表面应用CFUBMS方法制备TiN薄膜后,显微硬度明显增加,磨擦系数和磨损体积明显减小。结论 CFUBMS氮化钛镀膜对纯钛铸件有较好的磨损保护作用。
Objective To evaluate the effects of titanium nitride（TiN） coating on surface microhardness and wear resistance of cast titanium.Methods TiN film was deposited on cast titanium using closed field unbalanced magnetron sputtering（CFUBMS）,after that microhardness and wear resistance of the cast titanium specimens were characterized by hardness testing and friction and wear test respectively.Results After TiN films were deposited on cast titanium,its microhardness increased significantly,wear volume and friction coefficient decreased significantly.Conclusion CFUBMS TiN coating can protect cast titanium from abrasion excessively.
出处
《国际口腔医学杂志》
CAS
2011年第1期31-33,共3页
International Journal of Stomatology
关键词
氮化钛
闭合场非平衡磁控溅射
显微硬度
耐磨性
titanium nitride
closed field unbalanced magnetron sputtering
microhardness
wear resistance
