摘要
设计了一种新型的多阴极金属等离子体源,对离子流分布均匀性、导管偏压和约束磁场电流进行了测试和优化。采用该装置制备了TiAlSiN多元复合薄膜,利用EDX、XRD、XPS和纳米探针对薄膜的组成、微结构和力学性能进行测试分析。结果表明,该装置可成功地制备复合薄膜,合成的薄膜具有n-TiAlN/a-Si3N4复合结构,具有高的硬度(≥35 GPa)。
A new multiple-cathodes metal plasma source was designed. The plasma uniformity, duct bias voltage and current of the magnetic coils were studied and optimized. TiAlSiN composite coating was prepared on this equipment. The chemical composition, microstructure and mechanical properties of the coating were investigated by utilizing energy dispersive X-ray （EDX）, X-ray diffraction （XRD）, X-ray photoelectron spectroscopy （XPS） and nano- indentation measurement. The results revealed that the equipment can be used for preparing composite coating. TiAlSiN coating showed n-TiAlN/a-Si3N4 composite structure. In addition, the film showed high hardness （≥35 GPa）.
出处
《核技术》
CAS
CSCD
北大核心
2011年第1期18-21,共4页
Nuclear Techniques
基金
国家自然科学基金(10875033)资助
关键词
多阴极等离子体源
均匀性
复合薄膜
硬度
Multiple-cathodes plasma source
Uniform
Composite coating
Hardness
