摘要
248 nm放电抽运KrF准分子激光器在微电子学和医学等领域有重要的应用价值。在大多数应用中,激光器的最大输出效率和能量都是十分重要的参数。为了提高激光器输出效率和能量,实现KrF准分子激光器的稳定放电,采用新型开关电源和结构紧凑的张氏电极,并通过优化储能/放电电容比例和工作气体配比等方法,研制出了一台小型高效率放电抽运KrF准分子激光器。研究了开关电源对充放电特性的影响,以及气体配比对激光输出效率和能量的影响。该激光器的各项参数相比以往的产品有了较大改善,可重复频率为1~80 Hz,输出效率最高达2.5%,最大单脉冲输出能量380 mJ;当工作电压高于25 kV时,激光输出能量不稳定度约为1.8%。
248 nm discharge-pumped KrF excimer laser is importantly used in microelectronics and medicine.For most applications,maximal output efficiency and energy are very important parameters of a laser.A KrF excimer laser with high efficiency is developed.For obtaining the maximal output efficiency and energy and achieving the stationary discharge of the KrF excimer laser,a new switching power supply,compact electrodes the optimization of storage/discharge capacity,and gas mixture are used to develop a small-type high-efficency discharge-pumped KrF excimer laser.The effect of switching power supply on the charge/discharge characteristic and the effect of gas mixture on the output efficiency and energy of the laser are studied.Compared with the previous product,the property of the laser is improved considerably.The repetition rate of the laser is 1~80 Hz,the maximal efficiency is about 2.5% and the maximal output energy is up to 380 mJ.The pulse to pulse stability is about 1.8% with discharge voltage above 25 kV.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2011年第1期1-5,共5页
Chinese Journal of Lasers
关键词
激光器
准分子激光器
输出效率
单脉冲输出能量
放电抽运
开关电源
lasers
excimer laser
output efficiency
signal pulse output energy
discharge pump
switching power supply
