采用柔性铰链罗伯威尔结构的石英谐振式力传感器

Quartz resonator force sensor utilizing flexible hinges

介绍了一种采用柔性铰链构成的罗伯威尔结构和ＡＴ－切精密石英谐振器组成的石英谐振式力传感器。柔性铰链无间隙、无机械摩擦、充分体现材料的性能，传感器只由弹性体和谐振器两个部分组成，力的传递环节少，误差小可靠性高。通过调整柔性铰链的尺寸，可以得到不同量程的传感器。解决了整体式石英谐振式力传感器加工困难、成本高和组合式环节多、精度不高的缺点，为石英谐振式力传感器找到了一种较为合适的结构，使石英本身优良的性能得到发挥。研制了精度较高、成本较低、数字量输出的石英谐振式力传感器，并且给出了传感器的精度指标。

This paper describes a digital force sensor with a range of 600N utilizing flexible hinges and a precision 11MHz AT cut piezoelectric quartz resonator as the sensing element. A force proportional to the applied force was applied to the quartz resonator via elastic body consisting of several flexible hinges and the resulting frequency change was proportional to applied force. The sensor has an ultimate resolution of less than 0.06N. Since the flexible hinge has no mechanical friction and no hysteresis, and the sensor includes only two parts quartz resonator and elastic body, non elastic effects are minimized. The resonator, effects of flexible hinge geometry on sensitivity and measurement range were discussed. A practical design was developed and experimental results show the force sensor has a good effect of linearity, hysteresis and repeatability.