摘要
研究了阳极氧化三氧化二铝多孔膜的制备工艺,采用两步阳极氧化法和独特的后处理工艺获得了孔洞分布均匀、孔径大小一致且耐水合的多孔氧化膜,分析了传感器的湿敏特性:传感器的湿滞<2%,响应时间<10s,恢复时间<40s,性能非常优良。
A humidity sensor based on porous Al2O3 thin film was investigated.The porous Al2O3 thin film was fabricated using electronic chemical etching.Two-step anodic oxidation and unique post treatment obtains the hole distribution even aperture size consistent also bears the hydration the porous oxide film.Humidity sensing properties of the sensor：sensor less than 2% wet delay,response time less than 10s,recovery time is less than 40s,the performance is very good.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2011年第1期80-82,87,共4页
Journal of Functional Materials
关键词
湿度传感器
氧化铝
多孔膜
金电极
humidity sensor
alumina
porous membrane
gold electrode
