Li_(0.33)La_(0.56)TiO_3薄膜电解质的结构和光电性能

Structural and Photoelectrical Properties of Thin-film Li_(0.33)La_(0.56)TiO_3 Electrolyte

采用射频磁控溅射法,自制Li0.33La0.56TiO3陶瓷靶材,在不同基片温度下沉积了Li0.33La0.56TiO3薄膜。利用X射线衍射仪、原子力学显微镜、电化学工作站、紫外-可见分光光度计等现代测试手段,研究了基片温度对薄膜的结构、形貌、光学和电学性能的影响。结果表明:所制备的Li0.33La0.56TiO3薄膜为非晶态结构,在可见光波段具有较高的透过率;随着基片温度从50℃升高到300℃,薄膜表面更为平整致密,离子电导率逐渐增加。

Li0.33La0.56TiO3 thin films were prepared by radio-frequency magnetron sputtering at different substrate temperatures from a ceramic target of Li0.33La0.56TiO3.XRD,AFM,AC impedance spectrum,UV-Vis were utilized to investigate the influences of substrate temperature on the morphological,optical and electrochemical properties of Li0.33La0.56TiO3 thin films.The results indicate that Li0.33La0.56TiO3 thin films have amorphous structure and high transmission in the range of visible wavelength;the thin films obtain smoother surface and higher ionic conductivity with the increase of substrate temperature from 50 ℃ to 300 ℃.