基于透射电子显微镜TDX-200观察室的应力、应变分析

Calculation and analysis on the strain-stress distribution for the viewing chamber of TDX-200 TEM

透射电子显微镜的观察室不仅要有便于观察、成像、照相等功能,还承载着电镜主体镜筒和电子枪的重量,因此观察室的设计与加工是镜筒主体制造的关键部分。本文以我国自主设计的TDX-200透射电子显微镜的观察室为研究对象,采用有限元结构分析软件ANSYS对其进行应力应变分析计算,为该类型的透射电子显微镜观察室设计和制造提供可靠数据。

The viewing chamber of a transmission electron microscopy（TEM） undertakes not only the functions of viewing,imaging and recording,but also the weight of the main column including the electron beam gun.Therefore,the calculation and analysis of stress-strain distribution of the chamber is very important.In this study,the calculation and analysis on the stress-strain distribution of the viewing chamber of TDX-200 TEM by finite element software ANSYS were studied,which may provide essential data for the design and manufacture of the TEM.