摘要
考虑了重掺杂引起的禁带变窄效应,建立起少数载流子室温和低温模型,并进行了定量的计算。研究发现,p-Si1-xGex中的少子浓度(电子)随x的增加而增加。在重掺杂条件下,常温时,少子浓度随杂质浓度的上升而下降;而低温时,少子浓度却随杂质浓度的上升而上升。
Taking band gap narrowing effect resulting from heavy doping into consideration,calculative models for minority carrier(electron) concentration in p Si 1-x Ge x layers at room and low temperatures are presented It has been shown that the minority carrier increases with the Ge fraction in p Si 1-x Ge x layers Furthermore,it has been found that,for heavily doped SiGe layers,as the doping concentration increase,the minority carrier concentration decreases at room temperature,but increases at low temperatures
出处
《微电子学》
CAS
CSCD
北大核心
1999年第5期311-313,共3页
Microelectronics
基金
北京市自然科学基金! (4982 0 0 4 )
北京市科技新星计划基金 !(952 871 90 0 )
电子元器件可靠性国家实验室资助课题 !(990 30 4 0 1 )
关键词
半导体材料
SIGE合金
低温特性
掺杂
Semiconductor material
SiGe alloy
Low temperature characteristics
Doping