高能质子辐照在制造和修复高速晶闸管中的应用研究

Study on Fabrication and Repair of Fast Switching Thyristor by High Energy Proton Irradiation

用高能质子辐照代替１２ＭｅＶ 电子辐照， 制造出ＫＫ２００Ａ 晶闸管。对辐照前后以及退火后的宏观电学参数测量发现， ３９ＭｅＶ 的质子辐照不仅能有效缩短晶闸管的关断时间， 提高工作频率， 还能有效修复制造过程中电压穿通的晶闸管，

KK200A type fast switch thyristors was fabricated by proton irradiation in stead of 12MeV electron irradiation.It was found that 3 9MeV proton irradiation could not only reduced switching time of thyristor,but also repair thyristor which had been blockout and therefsre could be improved to be fast switching thyristor.