摘要
介绍了集成电路制造用的电子气体中粒子控制规范、供气系统用的材料及其处理技术、供气管路和配件技术。
The controlling specifications of the particle in the electronic gas used for IC manufacturing,materials used for distribution system and its preparation technologies,gas distribution tubes and accessory parts technologies,particle filtering and countering technologies,are described is this paper.
出处
《半导体技术》
CAS
CSCD
北大核心
1999年第5期59-63,共5页
Semiconductor Technology
关键词
粒子规范
半导体厂
超净供气系统
兆位级IC
Gas distribution system Particle filtering Particle counter Particle standardsAPPLICATION TO FAULT DIAGNOSIS$$$$ PEN Zhi gang\ ZHANG Ji hui\ XU Xin he (Control & Simulation Center, Northeasterh University, Shenyang\ 110006)Abstract A
