光致抗蚀干膜用水溶性丙烯酸树脂的优化合成

Optimum synthesis of waterborne acrylic resin for photoresist dry film

以甲基丙烯酸甲酯(MMA)、丙烯酸丁酯(BA)、丙烯酸(AA)为主要原料,合成了应用于水性光致抗蚀干膜的水溶性丙烯酸树脂。采用正交试验法通过GPC、红外、热重分析及拉伸实验研究了引发剂用量、引发剂滴加时间、亲水性功能单体AA的用量、软单体BA的用量、中和度对树脂水溶性,树脂相对分子质量以及漆膜性能的影响。研究表明,优化合成反应条件如下:引发剂质量分数1.4%、引发剂滴加时间3 h、AA单体质量分数30%、BA单体质量分数5%、中和度45%,产物的单体转化率高于95%且能在常温下稳定贮存12个月以上,树脂水溶性达到85%以上;树脂数均分子质量n<45 000且分布系数PD﹤2。树脂漆膜拉伸强度>1.368 MPa,在350℃开始分解直至450℃分解完全。

The waterborne acrylic resins for photoresist dry film were synthesized using MMA,BA and AA as main materials.The effects of the initiator content,dropping time of initiator,hydrophilic functional monomer AA content,soft monomer BA content and neutralization degree on the water-solubility and molecular weight of the resins and tensile strength of the coating film were investigated with orthogonal experiments by GPC,IR,TGA and tensile tests.The results showed that the optimal reaction conditions were as follows： initiator content 1.4%,dropping time of initiator 3 h,AA content 30%,BA content 5% and neutralization degree 45%.The monomer conversion rate was higher than 95% and the product could be stored for more than 12 months at room temperature.The water solubility of the resins was more than 85% and the number average molecular weights of the resins were less than 45 000 and the distribution coefficient PD was less than 2.The tensile strength of the coating films was more than 1.368 MPa.The films started to decompose at 350 ℃ until the complete decomposition at 450 ℃.