毫米波数控移相器的设计与制作

Design and Fabrication of Digital Millimeter Wave Phase Shifters

移相器是毫米波相控阵雷达收发系统重要电路,基于安捷伦IC-CAP软件及砷化镓原片工艺线,研究了砷化镓毫米波开关器件测试、建模技术及其应用。采用0.15μm GaAs PHEMT工艺成功制作了一款Ka波段5位数控移相器MMIC,对毫米波数控移相器MMIC集成电路的设计、制作过程进行了阐述,并给出了测试结果。电路设计采用了开关滤波拓扑结构,运用微波探针在片测试系统对芯片进行了实测,在34~36 GHz范围内获得了优异的电性能。给出了移相器的测试曲线,32态均方根移相误差（RMS）5°,插入损耗典型值8 dB,输入/输出电压驻波比系数典型值2,芯片尺寸为2.5 mm×1.5 mm×0.1 mm。

Phase shifters is an important circuit for T/R systems of the millimeter wave phased-array radar.Based on the Aglient IC-CAP and GaAs foundry process line,the test and modeling techniques for the GaAs switch device and its application were studied.A Ka-band 5 bit digital phase shifter MMIC was successfully fabricated using 0.15 μm GaAs PHEMT process.The design and process were illustrated,and the practical test results were given.A switch filter topology was employed in the design of the phase shifter.The phase shifter was measured by on-wafer measurement system.It demonstrates a maximum RMS phase error of 5°,a nominal IL of 8 dB,a nominal VSWR of 2 over 34 GHz to 36 GHz bandwidth.The chip size of the phase shifter is 2.5 mm×1.5 mm×0.1 mm.