提高输出推力的蠕动式微进给定位机构

An Inchworm Type of Micro Feed and Ultra precision Positioning Mechanism Charact erized with High Thrust Force

蠕动式压电／电致伸缩微进给机构具有在保持高位移分辨率的同时实现大位移行程的特点，但迄今进给刚度和推力较小，以及不连续进给运动的不足之处制约了蠕动机构的实际应用。本文作者研究通过采用柔性铰链构成的周向分布式杠杆箝位机构的设计，研制出一种提高轴向刚度和输出推力的蠕动式压电／电致伸缩微进给机构，并进行了机构性能的初步测试。

The piezoelectric/elect rostricti ve inchworm mechanisms have the feature to realize long stroke movement with hig h resolution.But most of them have no en ough rigidity and output thrust force,so that their practical applications are r estricted.This research focused on the d evelopment of an inchworm type of micro feed and ultra precision positioning mec h anism characterized with high thrust for ce,by devising a novel clamping mechanis m with force magnifying structure.The p reliminary performance of the inchworm m echanism is presented and the control st rategies for continuous path and ultra p recision positioning are also discussed in this paper.