微米/纳米技术在光存储中的应用研究

The application and study of MEMS technology in optical memory

微米/纳米技术是一种基于硅片技术的小型机电系统。通过此技术,光盘存储可以突破原有局限,实现更高的存储密度和更快的存取速度。

MEMS is a micro electronic-mechanical system based on silicon chip. Via the technology, optical memory can overcome some limits and reach higher density and shorter access time. In the paper, we will discuss application of MEMS technology in optical memory