9Cr18轴承钢氮等离子体浸没离子注入表面改性工艺及机理的研究

Surface modification process and mechanism of 9Cr18 bearing steel using nitrogen plasma immersion ion implantation

采用不同的等离子体浸没离子注入工艺对９Ｃｒ１８ 轴承钢进行了氮离子注入，结果发现，不同条件下的氮离子注入均能显著提高９Ｃｒ１８ 钢表面的显微硬度和耐磨性，同时耐腐蚀性也明显改善． 实验分析结果表明，氮离子注入后试样表面形成了大量的氮化物相，它们在改善材料表面特性中起到了关键的作用．

Different nitrogen plasma immersion ion implantation process of 9Cr18 bearing steel are conducted. It is found that nitrogen ion implantion under different conditions can significantly enhance the microhardness, and improve the wear and corrosion properties of 9Cr18 steel. Experimental analysis has shown that the nitride phases formed in surface layer during PIII treatment play an important role in improving the surface properties of 9Cr18 steel.