提高物理气相沉积TiN膜界面结合力的研究进展

Progress of Research on Improving the Adhesion of the Interface of Physcial Vapor Deposition TiN Coating/Steel Substrate

综述了物理气相沉积(PVD)TiN和合金氮化物超硬膜膜/基界面及过渡层微观组织结构的研究进展,揭示了界面微观结构与镀层结合力之间的内在联系,为改善工艺及提高镀层性能提供了理论依据。

Progress of research on microstructure in the interface and transitionlayer of physical vapor deposition(PVD) TiN and alloy nitrides superhardness coatings/steel substrate is reviewed in this paper. The relationships between the interfacial microstructure and the adhesion of the coatings have been analyzed. The theoretical foundations have been provided for improving processes and properties of the coatings.