高线性微机械差分电容式加速度计测量电路

A High Linear Interface Circuit for Micro Machined Differential－capacitance Type Accelerometer

介绍了一种可用于微机械电容式加速度传感器的接口电路，该电路应用了开关型相敏解调电路，具有灵敏度高、线性好的特点，能测量微差分电容的变化。实验结果表明，该电路的线性高，测量微差分电容具有良好性能，是一种具有实用价值的微差分电容测量接口电路。应用该电路于最新开发成的微机械电容式加速度传感器，电路输出信号的非线性小于0．20％。

A high linear interfaCe cireuit for ndcro machinedcapacitive accelerometer is indced. A switch Phase de-modulator is used in the cireuit. And the cireuit has highsensihvity and low nonlinearity in sensing ndnor differentialcapacitance. Experimental result show a 0. 20% norilinear-ity while the cireuit was used in a novl micro machined ca-pacitive accelerometer.