摘要
用单片机控制双向可控硅的恒功率控制仪用于控制扩散泵加热,保证了扩散泵在最佳加热功率条件下长时间稳定工作。该控制仪可实现多路控制,具有效率高、体积小、重量轻、成本低的特点。文中介绍了该仪器的工作原理、设计方案和主程序流程图。
Applying constant power controller that is consisted of Triac controlled by the singlechip to heat the diffusion pump ensures that the pump can be operated in optimum heating power in long term. This controller has multi channel output and features of high efficiency, small size, low weight and low cost.The operating principle, design scheme, main program flowchart and experimental results are also presented.
出处
《真空》
CAS
北大核心
1999年第5期26-28,共3页
Vacuum