罗兰圆型二维集成凹面光栅的成像分析

Analysis of two-dimensional integrated Rowland Circle grating

利用标量波动衍射理论,通过对光栅槽面的数值积分,计算了罗兰圆型集成二维凹面光栅像点的光强分布.分析了工艺中的折射率偏差对光谱位置的影响,计算了光栅的色散和分辨力,并与几何光学的分析方法作了比较,分析了光栅的槽面数、光源的模场宽度以及因工艺产生的槽面圆角对光栅成像的影响;

The characteristic of integrated Rowland circle concave grating is analyzed by the scalar wave theory.Based on calculated intensity distribution,the influence of refractive index deviation on the position of spectrum is investigated.The simulated results of dispersion and resolution are compared with that calculated by the geometric ray tracing method.The image quality affected by groove number,mode size and groove rounding is analyzed in details.Fanally the grating diffraction efficiency is obtained approximately by the scalar wave analysis in the end.