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自动缺陷分类系统在超声扫描显微镜中的应用

Application of Automatic Defect Classification System In Scanning Acoustic Microscope
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摘要 介绍了超声扫描显微镜中的一种自动缺陷分类系统。该系统采用连通区域标记技术,分析缺陷的具体特征,根据设定阈值将它们分类,由此可以判断哪些是可以接受的缺陷,哪些是需要检出的严重缺陷。系统自动分析的特征,减少了缺陷分析时间和主观性造成的缺陷分类错误,使得分析结果更加精确,重复性更高。 A system of automatic defect classification applied in scanning acoustic microscope is proposed in this paper.Based on technology of connected component labeling,the system analyses the characters of defects,and classify defects according to the preset threshold,so that we can easily distinguish accepted defects and serious defects which need to be picked out.Automatic analysis reduces the processed time and subjective mistakes so that the analysis results are more exact and better repetition.The overall efficiency is improved smartly.
作者 连军莉 魏鹏
出处 《电子工业专用设备》 2011年第1期1-3,14,共4页 Equipment for Electronic Products Manufacturing
关键词 超声扫描显微镜 缺陷 自动分类 Scanning acoustic microscope Defect Automatic classification
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